2008 / March Volume 3 No.1
Kinetic theory approach to the study of MEMS
Published Date |
2008 / March
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Title | Kinetic theory approach to the study of MEMS |
Author | |
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Pagination | 99-114 |
Abstract | We survey some recent applications of the Boltzmann equation to the study of MEMS.
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Received |
2007-09-24
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