Kinetic theory approach to the study of MEMS
by
Carlo Cercignani
Vol. 3 No. 1 (2008) P.99~P.114
ABSTRACT
We survey some recent applications of the Boltzmann equation to the study of MEMS.
KEYWORDS
MATHEMATICAL SUBJECT CLASSIFICATION 2010
Primary:
MILESTONES
Received: 2007-09-24
Revised :
Accepted:
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